Open Access Open Access  Restricted Access Subscription Access

Influence of the driving frequency and equivalent parameters on displacement amplitude of electrostatic linear comb actuator

Hoang Trung Kien, Vu Cong Ham, Pham Hong Phuc


A new method determining the equivalent dynamic parameters such as stiffness, vibrating mass, and air damping factor in motion direction of shuttle (i.e. in y-direction) is proposed, thence the differential motion equation of shuttle is established and solved to achieve a typical displacement formula. Simulation and experimental results show that the change of ELCA' displacement is inappreciable while the range of driving frequency up to 27 Hz (error of 10% with driving voltage is a square wave). Moreover, the range of driving frequency for the ELCA can be extended up to 1 kHz with displacement amplitude error of 10% while the shape of driving voltage is a harmonic sine wave.


Electrostatic Linear Comb Actuator (ELCA); driving frequency; dynamic parameters; displacement amplitude

Full Text:



W. C. Tang, T.-C. H. Nguyen, M. W. Judy, and R. T. Howe. Electrostatic-comb drive of lateral polysilicon resonators. Sensors and Actuators A: Physical, 21, (1-3), (1990), pp. 328–331.

J. Bernstein, S. Cho, A. King, A. Kourepenis, P. Maciel, and M. Weinberg. A micromachined comb-drive tuning fork rate gyroscope. In Proceedings IEEE Micro Electro Mechanical Systems Workshop (MEMS’93). IEEE, (1993), pp. 143–148.

D. V. Dao, P. H. Pham, and S. Sugiyama. Multimodule micro transportation system based on electrostatic comb-drive actuator and ratchet mechanism. Journal of Microelectromechanical Systems, 20, (1), (2011), pp. 140–149.

P. H. Pham, L. B. Dang, V. H. Nguyen, and V. T. Dau. Development of new electrostatic micro cam system driven by elastic wings. Microsystem Technologies, 23, (12), (2017), pp. 5669–5675.

F. Khan, S. A. Bazaz, and M. Sohail. Design, implementation and testing of electrostatic SOI MUMPs based microgripper. Microsystem Technologies, 16, (11), (2010), pp. 1957–1965.

R. Legtenberg, A. W. Groeneveld, and M. Elwenspoek. Comb-drive actuators for large displacements. Journal of Micromechanics and Microengineering, 6, (3), (1996), pp. 320–329.

S. Gupta, T. Pahwa, R. Narwal, B. Prasad, and D. Kumar. Optimizing the performance of MEMS electrostatic comb drive actuator with different flexure springs. In Proceedings of COMSOL Conference, Bangalore, India, (2012). pp. 1–6, paper.pdf.

M. Imboden, J. Morrison, E. Lowell, H. Han, and D. J. Bishop. Controlling levitation and enhancing displacement in electrostatic comb drives of MEMS actuators. Journal of Microelectromechanical Systems, 23, (5), (2014), pp. 1063–1072.

B. Borovic, F. L. Lewis, A. Q. Liu, E. S. Kolesar, and D. Popa. The lateral instability problem in electrostatic comb drive actuators: modeling and feedback control. Journal of Micromechanics and Microengineering, 16, (7), (2006), p. 1233.

P. H. Pham and L. B. Dang. Influence of the side etching effect in DRIE on performance of electrostatic linear comb-drive actuators. Microsystem Technologies, 24, (5), (2018), pp. 2215–2222.

A. R. Kalaiarasi and S. H. Thilagar. Design and modeling of electrostatically actuated microgripper. In Proceedings of IEEE/ASME International Conference on Mechatronics and Embedded Systems and Applications (MESA). IEEE, (2012), pp. 7–11.

P. H. Pham, D. V. Dao, and S. Sugiyama. A micro transportation system (MTS) with large movement of containers driven by electrostatic comb-drive actuators. Journal of Micromechanics and Microengineering, 17, (10), (2007), pp. 2125–2131.

W. C. Tang. Electrostatic comb drive for resonant sensor and actuator applications. PhD thesis, University of California at Berkeley, USA, (1990).

Y. Guan, S. Gao, H. Liu, and S. Niu. Acceleration sensitivity of tuning fork gyroscopes: Theoretical model, simulation and experimental verification. Microsystem Technologies, 21, (6), (2015), pp. 1313–1323.

M. H. Bao. Analysis and design principles of MEMS devices. Elsevier, Amsterdam, The Netherlands, 1st edition, (2005).

S. S. Rao. Mechanical vibrations. Addison-Wesley, Boston, USA, 3rd edition, (1995).

DOI: Display counter: Abstract : 318 views. PDF : 45 views.


  • There are currently no refbacks.

Copyright (c) 2018 Vietnam Academy of Science and Technology


Editorial Office of Vietnam Journal of Mechanics

3rd Floor, A16 Building, 18B Hoang Quoc Viet Street, Cau Giay District, Hanoi, Vietnam
Tel: (+84) 24 3791 7103